01129oam 2200301z- 450 991013322910332120150908124703.01-4799-0440-6(CKB)3390000000045125(EXLCZ)99339000000004512520220628c2013uuuu -u- -eng2013 IEEE International Interconnect Technology Conference (IITC 2013) Kyoto, Japan, 13-15 June 2013IEEE1-4799-0437-6 1-4799-0438-4 2013 IEEE International Interconnect Technology Conference - IITCInterconnect Technology Conference Interconnects (Integrated circuit technology)CongressesSemiconductorsDesign and constructionCongressesInterconnects (Integrated circuit technology)SemiconductorsDesign and construction621.3815Institute of Electrical and Electronics Engineers.PROCEEDING99101332291033212013 IEEE International Interconnect Technology Conference (IITC 2013)2883383UNINA