00849oam 2200265z- 450 991013163020332120241212220531.097814673671961467367192(CKB)3710000000461227(EXLCZ)99371000000046122720220628c2015uuuu -u- -engMicro/Nanotechnologies and Electron Devices (EDM), 2015 16th International Conference of Young Specialists onIEEE9781467367202 1467367206 9781467367189 1467367184 2015 16th International Conference of Young Specialists on Micro/Nanotechnologies and Electron DevicesMicro/Nanotechnologies and Electron Devices PROCEEDING9910131630203321Micro-3060053UNINA