01452oam 2200469zu 450 991013070640332120241212220404.097823550002182355000212(CKB)3420000000000475(SSID)ssj0000750553(PQKBManifestationID)12350874(PQKBTitleCode)TC0000750553(PQKBWorkID)10749145(PQKB)10575261(NjHacI)993420000000000475(EXLCZ)99342000000000047520160829d2012 uy engur|||||||||||txtccr2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS[Place of publication not identified]IEEE20121 online resourceBibliographic Level Mode of Issuance: Monograph9781467307857 1467307858 Microelectronic packagingCongressesOptoelectronic devicesCongressesMicroelectromechanical systemsCongressesMicroelectronic packagingOptoelectronic devicesMicroelectromechanical systems621.381IEEE StaffPQKBPROCEEDING99101307064033212012 Symposium on Design, Test, Integration and Packaging of MEMS2511646UNINA