01404oam 2200445zu 450 991013068700332120241212220404.097814673116491467311642(CKB)3420000000000569(SSID)ssj0000781124(PQKBManifestationID)12343752(PQKBTitleCode)TC0000781124(PQKBWorkID)10821812(PQKB)10174607(NjHacI)993420000000000569(EXLCZ)99342000000000056920160829d2012 uy engur|||||||||||txtccr2012 70th Annual Device Research Conference[Place of publication not identified]IEEE20121 online resource (278 pages)Bibliographic Level Mode of Issuance: Monograph9781467311632 1467311634 Microelectromechanical systemsReliabilityCongressesMicroelectromechanical systemsDesign and constructionCongressesMicroelectromechanical systemsReliabilityMicroelectromechanical systemsDesign and construction621.381ieeePQKBPROCEEDING99101306870033212012 70th Annual Device Research Conference2524788UNINA