00856nam0-2200313---450-99000909933040332120160302114438.00070585024000909933FED01000909933(Aleph)000909933FED0100090993320091006d1994----km-y0itay50------baengUS--------001yyThin-film depositionprinciples and praticeDonald L. SmithNew YorkMcGraw-Hil1994XXIII, 616 p.ill.24 cm.Metallurgia elettrochimica621.3815Smith,Donald L.65377ITUNINARICAUNIMARCBK99000909933040332114 P.030.0115677DINMPDINMPThin-film deposition782016UNINA