02227nas 2200433 n 450 99000899586040332120240229084539.01071-1023000899586FED01000899586(Aleph)000899586FED01000899586CNRP 0023244820161109a19919999km-y0itaa50------baengauu--------Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena1991-New YorkPublished for the Society by the American Institute of PhysicsBimestrale0010008995852001Journal of vacuum science & technology B: Microelectronics processing and phenomena0010008995842001Journal of vacuum science & technology B onlineMicroelectronics and nanometer structuresJournal of vacuum science and technology., Microelectronics and nanometer structuresJVST BJournal of vacuum science & technologyBJ. VAC. SCI. TECHNOL., B, MICROELECTRON. NANOMETER621.381/05American Vacuum SocietyITACNP20090723http://acnp.cib.unibo.it/cgi-ser/start/it/cnr/dc-p1.tcl?catno=923932&person=false&language=ITALIANO&libr=&libr_th=unina1Biblioteche che possiedono il periodicoSE990008995860403321Biblioteca "Roberto Stroffolini" - Dipartimento di Scienze Fisiche dell'Università Federico II1991-2005;FI1FI1Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena791400UNINA866-01NA079 Biblioteca "Roberto Stroffolini" - Dipartimento di Scienze Fisiche dell'Università Federico IIVia Cintia-Monte S. Angelo, 80126 Napoli (NA)081.676253;676756;676443081.676434itacnp.cib.unibo.itACNP Italian Union Catalogue of Serialshttp://acnp.cib.unibo.it/cgi-ser/start/it/cnr/df-p.tcl?catno=923932&language=ITALIANO&libr=&person=&B=1&libr_th=unina&proposto=NO