00951nam0-22003251i-450-99000801148040332120050223115336.00-13-081520-9000801148FED01000801148(Aleph)000801148FED0100080114820050223d2001----km-y0itay50------baengUSy-------001yySemiconductor manufacturing technologyMichael Quirk, Julian SerdaUpper Saddle River, NJPrentice Hall2001XIII, 666 p.ill.29 cmSemiconduttori: design e costruzione621.3815'2Quirk,Michael290231Serda,Julian294574ITUNINARICAUNIMARCBK99000801148040332110 E I 404DIET 2127DINELDINELSemiconductor manufacturing technology750624UNINA