00763nac0-22002771i-450-99000740546040332120030403000740546FED01000740546(Aleph)000740546FED0100074054620030403d1959----km-y0itay50------baengUSy-------001yyWater resourcesdevelopment and useby Allen V. KneeseKansas CityFederal Reserve Bank of Kansas City1959XI, 68 p.24 cmKneese,Allen V.32132ITUNINARICAUNIMARCBK990007405460403321BUSTA 20[12] 1462051FGBCFGBCWater resources1497508UNINA03371nam 2200637Ia 450 991043788160332120200520144314.01-283-63155-597866139440093-642-31776-610.1007/978-3-642-31776-7(CKB)2670000000257099(EBL)1030434(OCoLC)809261223(SSID)ssj0000746057(PQKBManifestationID)11411487(PQKBTitleCode)TC0000746057(PQKBWorkID)10863288(PQKB)11209956(DE-He213)978-3-642-31776-7(MiAaPQ)EBC1030434(PPN)168320304(EXLCZ)99267000000025709920120906d2013 uy 0engur|n|---|||||txtccrMultilayer integrated film bulk acoustic resonators /Yafei Zhang, Da Chen1st ed. 2013.Berlin ;New York Springer ;Shanghai Shanghai Jiao Tong University Pressc20131 online resource (158 p.)Description based upon print version of record.3-642-42755-3 3-642-31775-8 Includes bibliographical references and index.Introduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR.Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.Radio resonatorsDesign and constructionRadio frequency integrated circuitsDesign and constructionThin films, MultilayeredRadio resonatorsDesign and construction.Radio frequency integrated circuitsDesign and construction.Thin films, Multilayered.612Zhang Yafei1058827Chen Da1755329Shanghai jiao tong da xue.Chu ban she,MiAaPQMiAaPQMiAaPQBOOK9910437881603321Multilayer integrated film bulk acoustic resonators4192061UNINA