00943nam0-22003371i-450-99000399662040332120040203145056.00-471-23279-3000399662FED01000399662(Aleph)000399662FED0100039966220040203d2004----km-y0itay50------baENGUSa---a---001yyFundamentals of semiconductor fabricationGary S. May, Simon M. SzeNew YorkWiley2004xiii, 305 p.ill.24 cmSEMICONDUTTORICIRCUITI INTEGRATI621.3815'2May,Gary S.151097Sze,Simon Min7762ITUNINARICAUNIMARCBK99000399662040332110 E I 402DIET 2123DINELDINELFundamentals of semiconductor fabrication471928UNINA