01002nam0-22003131i-450-9900011190704033210-12-752117-8000111907FED01000111907(Aleph)000111907FED0100011190720000920d1984----km-y0itay50------baengCW Beam Processing of Silicon and Other SemiconductorsVolume Editor James F. GibbonsOrlando [etc.]Academic Press1984Semiconductors and Semimetalsedited by R.K. Willardson, Albert C. Beer, Eicke R. Weber17Semiconduttori537.622Gibbons,James F.906Beer,Albert C.Willardson,Robert Kent<1923- >ITUNINARICAUNIMARCBK99000111907040332130-099.02319724FI1FI1CW Beam Processing of Silicon and Other Semiconductors336791UNINAING01