00824nam0-22003011i-450-99000047623040332120080317150548.00-471-95000-9000047623FED01000047623(Aleph)000047623FED0100004762320020821d1973----km-y0itay50------baenga-------001yyIon beamswith applications to ion implantationRobert G. Wilson, George R. BrewerNew YorkWiley Interscience©1973500 p.ill.24 cmIoni541.372Wilson,Robert G.Brewer,George R.ITUNINARICAUNIMARCBK99000047623040332110 B I 14128/LDINELDINELUNINA