01047nam0-22003251i-450-99000045639040332120080917100705.00-12-234105-8v. 50-12-234106-6v. 6000045639FED01000045639(Aleph)000045639FED0100004563920020821g19821983km-y0itay50------baenga-------001yyVLSI electronicsmicrostructure scienceedited by Norman G. EinspruchNew York [etc.]Academic press1982-1983v.ill.24 cmv. 5;v. 6: Materials and process characterization / edited by Norman G. Einspruch, Graydon B. LarrabeeCircuiti integratiIntegrazione a grandissima scala (VLSI)621.395Einspruch,Norman G.ITUNINARICAUNIMARCBK99000045639040332110 C 125/51852 CCEDINEL10 C 125/61853 CCEDINELDINELUNINA