01112nam0-22003731i-450-99000013356040332120161025140101.00-9616721-3-7v. 10-9616721-4-5v. 2000013356FED01000013356(Aleph)000013356FED0100001335620020821g19869999km-y0itay50------baengUSa---a---001yySilicon processing for the VLSI EraStanley Wolf, Richard N. TauberSunset BeachLattice Press1986-v.24 cm1.: Process technology2.: Process integration3.: The submicron MOSFETCircuiti integratiIntegrazione a grandissima scala (VLSI)Silicio621.395Wolf,Stanley<1943- >Tauber,Richard N.ITUNINARICAUNIMARCBK99000013356040332113 P 06 079338FINBC13 P 06 089339FINBC13 24 1514278FINBCFINBCUNINA