01065nam0 22002771i 450 RML027800120231121125728.0155899177820121121d1993 ||||0itac50 baengusz01i xxxe z01nChemical perspectives of microelectronic materials IIIsymposium held November 30-December 3, 1992, Boston, Massachussetts, U.S.A.editors C.R. Abernathy...[et al.]Pittsburg MRS 1993xv, 727 p.ill.23 cm621.38121Abernathy, C.R.RMLV179164340ITIT-0120121121IT-FR0099 Biblioteca Area IngegneristicaFR0099 RML0278001Biblioteca Area Ingegneristica 54DII 621.381 CHE 54VM 0000478755 VM barcode:BAIN002693. - Inventario:3536DVMA 2004091720121204 54Chemical perspectives of microelectronic materials III3626098UNICAS