01112nam0 22003253i 450 MIL055048920231121125550.00125249756978012524975120141021d2002 ||||0itac50 baengusz01i xxxe z01nz02nMaterials science of thin filmsdeposition and structureMilton Ohring2. edSan Diego [etc.]Academic press2002XXI, 794 p.ill.24 cmFilm sottiliFIRRMLC382740I621.3815221Ohring, Milton <1936- >MILV097009070462774ITIT-0120141021IT-FR0099 Biblioteca Area IngegneristicaFR0099 MIL0550489Biblioteca Area Ingegneristica 54DMS 621.3815 OHR 54VM 0000460595 VM barcode:BAIN004877. - Inventario:1394MVMA 2004070720121204 54Materials science of thin films188399UNICAS