01516nam0 22003373i 450 MIL013182020231121125536.0079232003420141021d1992 ||||0itac50 baengnlz01i xxxe z01nCrucial issues in semiconductor materials and processing technologiesedited by S. Coffa ... \et al.!Dordrecht \etc.!Kluwer, published in cooperation with NATO scientific affairs division\1992!XIX, 538 p.ill.25 cmNATO ASI series. Series E, Applied sciences222Il nome formale del congresso si trova sul verso del front.001MIL00246522001 NATO ASI series. Series E, Applied sciences222SemiconduttoriCongressiFIRRMLC408601I621.3815221Coffa, SalvatoreMILV092075NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies <1991 ; Erice>MILV092077ITIT-0120141021IT-FR0099 Biblioteca Area IngegneristicaFR0099 MIL0131820Biblioteca Area Ingegneristica 54DII 621.3815 CRU 54VM 0000451305 VM barcode:BAIN002516. - Inventario:3771DVMA 2004060820121204 54Crucial issues in semiconductor materials and processing technologies3609560UNICAS