01572nam0 22003613i 450 VAN024264820220801012954.256N978331918675720220309d2015 |0itac50 baengCH|||| |||||Three-Dimensional Integration of SemiconductorsProcessing, Materials, and Applicationseditors Kazuo Kondo, Morihiro Kada, Kenji TakahashiChamSpringer2015XIX, 408 p.ill.24 cmCHChamVANL001889540Chimica generale22610.28Ingegneria biomedica22541.37Elettrochimica e magnetochimica22541.377Semiconduttori22623.045Ingegneria meccanica22KadaMorihiroVANV198463KondoKazuoVANV092219TakahashiKenjiVANV198464Springer <editore>VANV108073650ITSOL20240614RICAhttps://rd.springer.com/book/10.1007/978-3-319-18675-7https://rd.springer.com/book/10.1007/978-3-319-18675-7BIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHEIT-CE0101VAN17NVAN0242648BIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHE17CONS e-book 2219 17BIB2219/190 190 20220309 Three-Dimensional Integration of Semiconductors2276625UNICAMPANIA