01874nam0 22004093i 450 VAN021962520230607093426.628N978981150943820210930d2019 |0itac50 baengSG|||| |||||Laser Heat-Mode LithographyPrinciple and MethodsJingsong WeiSingaporeSpringer2019xiii, 208 p.ill.24 cm001VAN00239902001 Springer series in materials science210 BerlinSpringer291VAN0219627Laser Heat-Mode Lithography : Principle and Methods187338000A79 (77-XX)Physics [MSC 2020]VANC023182MF78A60Lasers, masers, optical bistability, nonlinear optics [MSC 2020]VANC029030MF74K35Thin films [MSC 2020]VANC033952MF74A50Structured surfaces and interfaces, coexistent phases [MSC 2020]VANC036162MFArbitrary pattern writingKW:KMaskless lithographyKW:KMetallo-organic compoundKW:KPhase changeKW:KThermal diffusionKW:KSGSingaporeVANL000061WeiJingsongVANV107137792199Springer <editore>VANV108073650ITSOL20240614RICAhttp://doi.org/10.1007/978-981-15-0943-8E-book – Accesso al full-text attraverso riconoscimento IP di Ateneo, proxy e/o ShibbolethBIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICAIT-CE0120VAN08NVAN0219625BIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICA08CONS e-book 4098 08eMF4098 20210930 Laser Heat-Mode Lithography : Principle and Methods1873380UNICAMPANIA