01947nam0 22004333i 450 VAN021576120230606114436.163N978303023299320210923d2019 |0itac50 baengCH|||| |||||Flash Lamp AnnealingFrom Basics to ApplicationLars Rebohle, Slawomir Prucnal, Denise ReichelChamSpringer2019xviii, 288 p.ill.24 cm001VAN00239902001 Springer series in materials science210 Berlin [etc.]Springer288VAN0215768Flash Lamp Annealing278518182-XXStatistical mechanics, structure of matter [MSC 2020]VANC021931MF78-XXOptics, electromagnetic theory [MSC 2020]VANC022356MF00A79 (77-XX)Physics [MSC 2020]VANC023182MF83-XXRelativity and gravitational theory [MSC 2020]VANC023243MFFLA assisted depositionKW:KHigh-k dielectricsKW:KHigh-k materialsKW:KMillisecond annealingKW:KSemiconductor NanostructuresKW:KTransparent conducting oxidesKW:KCHChamVANL001889RebohleLarsVANV184490837191PrucnalSlawomirVANV184491837192ReichelDeniseVANV184493837193ITSOL20230609RICAhttp://doi.org/10.1007/978-3-030-23299-3E-book – Accesso al full-text attraverso riconoscimento IP di Ateneo, proxy e/o ShibbolethBIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICAIT-CE0120VAN08NVAN0215761BIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICA08CONS e-book 3899 08eMF3899 20210923 Flash Lamp Annealing2785181UNICAMPANIA