01970nam0 22004933i 450 VAN021544820230606110515.507N978303033073620210922d2019 |0itac50 baengCH|||| |||||DIY MEMSFabricating Microelectromechanical Systems in Open Use LabsDeborah MunroChamSpringer2019xvi, 188 p.ill.24 cmVAN0215451DIY MEMS : Fabricating Microelectromechanical Systems in Open Use Labs187034900A79 (77-XX)Physics [MSC 2020]VANC023182MF94CxxCircuits, networks [MSC 2020]VANC027151MFActuatorsKW:KBiomedical EngineeringKW:KCleanroomsKW:KDIYKW:KFabricationKW:KLithographyKW:KMEMSKW:KMEMS PackagingKW:KMicroelectromechanical systemsKW:KMicrofabricationKW:KNNCIKW:KNanotechnologyKW:KNational Nanotechnology Infrastructure NetworkKW:KOpen use labsKW:KSoft materialsKW:KCHChamVANL001889MunroDeborahVANV184353837075Springer <editore>VANV108073650ITSOL20240614RICAhttp://doi.org/10.1007/978-3-030-33073-6E-book – Accesso al full-text attraverso riconoscimento IP di Ateneo, proxy e/o ShibbolethBIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICAIT-CE0120VAN08NVAN0215448BIBLIOTECA DEL DIPARTIMENTO DI MATEMATICA E FISICA08CONS e-book 3875 08eMF3875 20210922 DIY MEMS : Fabricating Microelectromechanical Systems in Open Use Labs1870349UNICAMPANIA