00826nam1 2200229 i 450 VAN012532320230605033016.34220191106d2018 |0itac50 baengDE|||| |||||Tetrahedrally Bonded Amorphous Carbon FilmsBernd SchultrichBerlinSpringer2018volumiill.24 cm001VAN01253252001 ˆ1: ‰Basics, Structure and PreparationBernd Schultrich210 BerlinSpringer2018215 XXXII, 752 p.ill.24 cm1BerlinVANL000066SchultrichBerndVANV096755768196Springer <editore>VANV108073650ITSOL20240614RICAVAN0125323Tetrahedrally Bonded Amorphous Carbon Films1564626UNICAMPANIA