01152nam0 22002893i 450 VAN0011962420240806100804.921N978-3-319-20385-020190123d2016 |0itac50 baengCH|||| |||||Design for Manufacturability with Advanced LithographyBei Yu, David Z. PanChamSpringer2016xi, 164 p.24 cmCHChamVANL001889YuBeiVANV091871788068PanDavid Z.VANV091872788069Springer <editore>VANV108073650ITSOL20240906RICAhttps://link.springer.com/book/10.1007%2F978-3-319-20385-0E-book – Accesso al full-text attraverso riconoscimento IP di Ateneo, proxy e/o ShibbolethBIBLIOTECA CENTRO DI SERVIZIO SBAVAN15NVAN00119624BIBLIOTECA CENTRO DI SERVIZIO SBA15CONS SBA EBOOK 2949 15EB 2949 20190123 Design for Manufacturability with Advanced Lithography1756533UNICAMPANIA