01600nam0 2200373 i 450 SUN012581220200331092510.2620.00N978981132571720191210d2018 |0engc50 baengSG|||| |||||*Thermoelectrical Effect in SiC for High-Temperature MEMS SensorsToan Dinh, Nam-Trung Nguyen, Dzung Viet DaoSingapore : Springer, 2018XI115 p.ill. ; 24 cmPubblicazione in formato elettronico001SUN01034342001 *SpringerBriefs in applied sciences and technology210 BerlinSpringer.SGSingaporeSUNL000061530.41Fisica dello stato solido22620.5Nanotecnologia22621.39Microingegneria22620.1Scienza dei materiali22Dinh, ToanSUNV097219769346Nguyen, Nam-TrungSUNV097220505357Dao, Dzung V.SUNV097221787308SpringerSUNV000178650Dao, Dzung VietDao, Dzung V.SUNV103791ITSOL20200921RICAhttps://link.springer.com/book/10.1007%2F978-981-13-2571-7#tocSUN0125812UFFICIO DI BIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHE17CONS e-book 2112 17BIB2112 304 20191210 Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors1753961UNICAMPANIA