01542nam0 2200349 i 450 SUN012571120200330012829.260.00N978331993925420191203d2018 |0engc50 baengCH|||| |||||*Metal Impurities in Silicon- and Germanium-Based TechnologiesOrigin, Characterization, Control, and Device ImpactCor Claeys, Eddy SimoenCham : Springer, 2018XXXIII438 p.ill. ; 24 cmPubblicazione in formato elettronico001SUN00239902001 *Springer series in materials science270210 BerlinSpringer1986-.CHChamSUNL001889621.36Ingegneria ottica. Ottica applicata22620.1Scienza dei materiali22541.377Semiconduttori22537.5344Microonde e onde a frequenza ultraalta22Claeys, CorSUNV097129769287Simoen, EddySUNV097130769288SpringerSUNV000178650ITSOL20200921RICAhttps://link.springer.com/book/10.1007%2F978-3-319-93925-4#tocSUN0125711UFFICIO DI BIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHE17CONS e-book 2112 17BIB2112 261 20191203 Metal Impurities in Silicon- and Germanium-Based Technologies1568124UNICAMPANIA