01513nam0 2200361 i 450 SUN012537520200408090952.1680.00N978331976294420191106d2018 |0engc50 baengCH|||| |||||*Physical Design and Mask Synthesis for Directed Self-Assembly LithographySeongbo Shim, Youngsoo ShinCham : Springer, 2018XIV138 p.ill. ; 24 cmPubblicazione in formato elettronico001SUN01233462001 *NanoScience and Technology210 BerlinSpringer.CHChamSUNL001889621.36Ingegneria ottica. Ottica applicata22620.5Nanotecnologia22621.39Microingegneria22620.1Scienza dei materiali22541.377Semiconduttori22Shim, SeongboSUNV096806768316Shin, YoungsooSUNV096807768317SpringerSUNV000178650ITSOL20200921RICAhttps://link.springer.com/book/10.1007%2F978-3-319-76294-4#tocSUN0125375UFFICIO DI BIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHE17CONS e-book 2112 17BIB2112 137 20191106 Physical Design and Mask Synthesis for Directed Self-Assembly Lithography1564886UNICAMPANIA