01052nam0 22002893i 450 SUN011962420190123114644.4260.00N978-3-319-20385-020190123d2016 |0engc50 baengCH|||| |||||*Design for Manufacturability with Advanced LithographyBei Yu, David Z. PanCham : Springer, 2016xi164 p. ; 24 cmPubblicazione in formato elettronicoCHChamSUNL001889Yu, BeiSUNV091871788068Pan, David Z.SUNV091872788069SpringerSUNV000178650ITSOL20200921RICAhttps://link.springer.com/book/10.1007%2F978-3-319-20385-0SUN0119624BIBLIOTECA CENTRO DI SERVIZIO SBA15CONS SBA EBOOK 2949 15EB 2949 20190123 Design for Manufacturability with Advanced Lithography1756533UNICAMPANIA