01295nam0 2200325 i 450 SUN010979320170608011550.1168-3-662-44394-10.00N978-3-662-44395-820170608d2015 |0engc50 baengDE|||| |||||*Micro and Nano FabricationTools and Processes Hans H. Gatzen, Volker Saile, Jürg Leutholdwith a Foreward and an Introduction by Richard S. MullerBerlin : Springer, 2015XXVI519 p.ill. ; 24 cmPubblicazione in formato elettronicoBerlinSUNL000066Gatzen, Hans H.SUNV084967739924Saile, VolkerSUNV084968739925Leuthold, JürgSUNV084969739926Muller, Richard S.SUNV026484SpringerSUNV000178650Garzen, H. H.Gatzen, Hans H.SUNV107670ITSOL20210503RICAhttps://link.springer.com/book/10.1007%2F978-3-662-44395-8SUN0109793BIBLIOTECA CENTRO DI SERVIZIO SBA15CONS SBA EBOOK 1386 15EB 1386 20170608 Micro and Nano Fabrication1466147UNICAMPANIA