01416nam0 2200361 450 00002267320090203170249.020081022d1930----km-y0itaa50------bafreFR<<La>> chose judiciaireLouise Roubaudpréface de Bernard Grasset12. edParis<<Bernard>> Grassetc1930XVIII, 321 p.19 cm.In cop. e in testa al front.firma autografa: Sergio de Pilato, aprile '930, VIIIFranciaOrdinamento giudiziario349.44(21. ed.)Diritto di singoli Stati e Nazioni (Diritto interno). Francia e Monaco306.250944(21. ed.)Istituzioni giudiziarie. FranciaRoubaud,Louis443938ITUniversità della Basilicata - B.I.A.RICAunimarc000022673Chose judiciaire87465UNIBASLETTERESTD0690120081022BAS011533STD0690120081022BAS011538STD0690120081118BAS011439TTM3020090203BAS011650TTM3020090203BAS011654TTM3020090203BAS011701TTM3020090203BAS011702BAS01BAS01BOOKBASA1Polo Storico-UmanisticoFDEP2Fondo De Pilato BiscioneFD/107471107471L1074712009012852Rari03358nam 2200685z- 450 991055712460332120210501(CKB)5400000000040808(oapen)https://directory.doabooks.org/handle/20.500.12854/68292(oapen)doab68292(EXLCZ)99540000000004080820202105d2021 |y 0engurmn|---annantxtrdacontentcrdamediacrrdacarrierMicro- and Nano-Fabrication by Metal Assisted Chemical EtchingBasel, SwitzerlandMDPI - Multidisciplinary Digital Publishing Institute20211 online resource (106 p.)3-03943-845-X 3-03943-846-8 Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates-Si, Ge, poly-Si, GaAs, and SiC-and using different catalysts-Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale-nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications.History of engineering and technologybicsscAl2O3 nanotubeanisotropic dry etchingantireflectionatomic layer depositionblack GaAsbulk Si etchingcatalystcatalyst encapsulationcurved Si structureelectroless depositionetching rateethanol electrooxidationgold (Au) metal assisted chemical etchinggold electroplatinghigh aspect ratio nanostructuresmagnetically guided metal-assisted chemical etchingmetal assisted chemical etchingmetal-assisted chemical etchingn/aPd nanoparticles-assisted chemical etchingphoton recyclingporous siliconsiliconsilicon conestransversal poresultra-high aspect ratioX-ray diffractive opticsX-ray grating interferometryzone plateHistory of engineering and technologyRomano Luciaedt1322889Romano LuciaothBOOK9910557124603321Micro- and Nano-Fabrication by Metal Assisted Chemical Etching3035223UNINA