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1. |
Record Nr. |
UNISALENTO991002667759707536 |
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Titolo |
Journal of vacuum science and technology / American Vacuum Society, American Institute of Physics. - 1964-1982 |
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Pubbl/distr/stampa |
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ISSN |
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Altri autori (Enti) |
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American Vacuum Societyauthor |
AIP <American Institute of Physics> |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Periodico |
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Note generali |
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Si scinde in: Journal of vacuum science and technology A: Vacuum, surfaces and films ; Journal of vacuum science and technology B: Microelectronics processing and phenomena |
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