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Record Nr. |
UNISALENTO991000092119707536 |
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Autore |
NATO Advanced Study Institute on Smart Sensors and MEMS (2003 : Pâovoa de Varzim, Portugal) |
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Titolo |
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Smart sensors and MEMS : [proceedings of the NATO Advanced Study Institute on smart sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003] / edited by Sergey Y. Yurish and Maria Teresa S.R. Gomes |
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Pubbl/distr/stampa |
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Dordrecht ; Boston : Kluwer Academic, c2004 |
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ISBN |
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Descrizione fisica |
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xv, 480 p. : ill. ; 24 cm |
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Collana |
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NATO science series. Series II, Mathematics, physics, and chemistry ; v. 181 |
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Altri autori (Persone) |
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Yurish, Sergey Y. |
Gomes, Maria Teresa S. R. |
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Disciplina |
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Soggetti |
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Detectors - Technological innovations - Congresses |
Microelectromechanical systems - Congresses |
Scanning systems - Congresses |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Nota di bibliografia |
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Includes bibliographical references and index |
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Nota di contenuto |
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Smart sensors for electrical and non-electrical, physical and chemical variables: state-of-the-art / Sergey Y. Yurish -- Novel conversion methods for self-adaptive smart sensors / Sergey Y. Yurish and Nikolay V. Kirianaki -- Resonant piezoelectric devices as physical and biochemical sensors / Fabien Josse and Richard W. Cernosek -- Acoustic-wave piezoelectric and pyroelectric sensor based on PZT thick films / Vittorio Ferrari -- Wireless passive SAW identification marks and sensors / Elke Mackensen and Leonhard Reindl -- Precise vectorial magnetic sensors / Pavel Ripka -- Micro-hall magnetic sensors: physical, technologies and applications / Radivoje S. Popovic, Giovanni Boero, and Pierre-Andre Besse -- Modern silicon-based MEMS technology / Ulrich Mescheder -- Porous silicon: technology and applications for micromachining and MEMS / Ulrich Mescheder -- Thermal design of microelectronics system / Dmytro Fedasyuk and Volodymyr Makar -- Chemical and biological sensors based on microcantilevers / P.G. Datskos, N.V. Lavrik and M.J. Sepaniak -- Uncooled infrared MEMS detectors / P.G. Datskos and N.V. Lavrik -- |
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