| |
|
|
|
|
|
|
|
|
1. |
Record Nr. |
UNISA996546670303316 |
|
|
Titolo |
Journal of vacuum science and technology . B Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B |
|
|
|
|
|
|
|
Pubbl/distr/stampa |
|
|
New York, NY, : AVS through the American Institute of Physics |
|
|
|
|
|
|
|
ISSN |
|
|
|
|
|
|
Disciplina |
|
|
|
|
|
|
Soggetti |
|
Nanotechnology |
Microelectronics |
Periodicals. |
|
|
|
|
|
|
|
|
Lingua di pubblicazione |
|
|
|
|
|
|
Formato |
Materiale a stampa |
|
|
|
|
|
Livello bibliografico |
Periodico |
|
|
|
|
|
Note generali |
|
|
|
|
|
| |