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Record Nr. |
UNISA996279733603316 |
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Titolo |
IEEE International Conference on Advanced Thermal Processing of Semiconductors : RTP |
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Pubbl/distr/stampa |
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Piscataway, N.J., : IEEE, ©2002- |
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ISSN |
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Disciplina |
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Soggetti |
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Semiconductors - Heat treatment |
Rapid thermal processing |
Semiconductor doping |
Semiconductors - Defects |
Periodicals. |
Conference papers and proceedings. |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Periodico |
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Note generali |
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Title from PDF of title page (viewed August 10, 2004). |
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