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Record Nr. |
UNISA996279650603316 |
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Titolo |
EMLC 2007 : 23rd European Mask and Lithography Conference : 22-25 January 2007, Grenoble, France |
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Pubbl/distr/stampa |
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[Place of publication not identified], : SPIE, 2007 |
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Collana |
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Proceedings of SPIE EMLC 2007 |
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Disciplina |
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Soggetti |
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Integrated circuits - Masks |
Microlithography |
Electrical & Computer Engineering |
Engineering & Applied Sciences |
Electrical Engineering |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Bibliographic Level Mode of Issuance: Monograph |
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