1.
Record Nr.
UNISA996216841703316
Titolo
10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada
Pubbl/distr/stampa
[Place of publication not identified], : IEEE, 2002
Soggetti
Semiconductors - Heat treatment
Rapid thermal processing - Defects
Semiconductor doping
Semiconductors
Electrical Engineering
Electrical & Computer Engineering
Engineering & Applied Sciences
Lingua di pubblicazione
Inglese
Formato
Materiale a stampa
Livello bibliografico
Monografia
Note generali
Bibliographic Level Mode of Issuance: Monograph