Record Nr.

UNISA996216841703316

Titolo

10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada

Pubbl/distr/stampa


[Place of publication not identified], : IEEE, 2002

Soggetti

Semiconductors - Heat treatment

Rapid thermal processing - Defects

Semiconductor doping

Semiconductors

Electrical Engineering

Electrical & Computer Engineering

Engineering & Applied Sciences

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

Bibliographic Level Mode of Issuance: Monograph