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1. |
Record Nr. |
UNISA996206561303316 |
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Titolo |
1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA |
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Pubbl/distr/stampa |
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[Place of publication not identified], : Northern California Chapter of the American Vacuum Society, 1996 |
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Disciplina |
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Soggetti |
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Semiconductor wafers - Congresses |
Semiconductors - Congresses - Effect of radiation on |
Plasma radiation - Congresses |
Electrical & Computer Engineering |
Electrical Engineering |
Engineering & Applied Sciences |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Bibliographic Level Mode of Issuance: Monograph |
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