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Record Nr. |
UNISA996206560003316 |
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Titolo |
1999 4th International Symposium on Plasma Process-Induced Damage : May 9-11, 1999, Monterey, California, USA |
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Pubbl/distr/stampa |
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[Place of publication not identified], : Northern California Chapter of the American Vacuum Society, 1999 |
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Disciplina |
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Soggetti |
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Semiconductor wafers - Effect of radiation on |
Semiconductors |
Plasma radiation |
Electrical & Computer Engineering |
Engineering & Applied Sciences |
Electrical Engineering |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Bibliographic Level Mode of Issuance: Monograph |
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