1.
Record Nr.
UNISA996204468903316
Titolo
IEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop : theme, "Semiconductor manufacturing : economic solutions for the 21st century" : ASMC 95 proceedings, November 13-15, 1995, Cambridge, MA, USA
Pubbl/distr/stampa
New York : , : Institute of Electrical and Electronics Engineers ; , 1995
Descrizione fisica
vi, 391 pages : illustrations ; ; 28 cm
Soggetti
Semiconductor industry - Congresses
Semiconductors - Design and construction - Congresses
Process control - Congresses
Lingua di pubblicazione
Inglese
Formato
Materiale a stampa
Livello bibliografico
Monografia
Note generali
Bibliographic Level Mode of Issuance: Monograph