IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 1996

• Record Nr.: UNISA996204455803316
• Pubbl/distr/stampa: [Place of publication not identified], : Institute of Electrical and Electronics Engineers, 1996
• Soggetti: Electromechanical devices - Congresses; Microelectronics - Congresses; Detectors - Congresses; Actuators - Congresses; Electrical & Computer Engineering; Electrical Engineering; Engineering & Applied Sciences
• Lingua di pubblicazione: Inglese
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Note generali: Bibliographic Level Mode of Issuance: Monograph