Record Nr.

UNISA996202459903316

Titolo

RTP 2003 : 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC

Pubbl/distr/stampa


[Place of publication not identified], : IEEE, 2003

Soggetti

Semiconductors - Heat treatment

Rapid thermal processing - Defects

Semiconductor doping

Semiconductors

Electrical Engineering

Electrical & Computer Engineering

Engineering & Applied Sciences

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

Bibliographic Level Mode of Issuance: Monograph