1.
Record Nr.
UNISA996202409303316
Titolo
Design, test, integration and packaging of MEMS/MOEMS 2003 : DTIP 2003 : 5-7 May, 2003, Cannes, France
Pubbl/distr/stampa
[Place of publication not identified], : IEEE, 2003
Disciplina
621.381
Soggetti
Microelectromechanical systems
Optoelectronic devices
Micromachining
Microelectronic packaging
Electrical & Computer Engineering
Electrical Engineering
Engineering & Applied Sciences
Lingua di pubblicazione
Inglese
Formato
Materiale a stampa
Livello bibliografico
Monografia
Note generali
Bibliographic Level Mode of Issuance: Monograph