1.
Record Nr.
UNISA996202108703316
Titolo
12th IEEE International Conference on Advanced Thermal Processing of Semiconductors : RTP 2004 : September 28-30, 2004, Hilton Portland & Executive Tower, Portland, OR
Pubbl/distr/stampa
[Place of publication not identified], : IEEE, 2004
Disciplina
621.3815/2
Soggetti
Semiconductors - Heat treatment
Rapid thermal processing - Defects
Semiconductor doping
Semiconductors
Electrical Engineering
Electrical & Computer Engineering
Engineering & Applied Sciences
Lingua di pubblicazione
Inglese
Formato
Materiale a stampa
Livello bibliografico
Monografia
Note generali
Bibliographic Level Mode of Issuance: Monograph