Digest of papers : Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan

• Record Nr.: UNISA996200407103316
• Pubbl/distr/stampa: [Place of publication not identified], : Japan Society of Applied Physics, 2007
• Disciplina: 620/.5
• Soggetti: Nanotechnology; Microelectronics; Microlithography; Electrical & Computer Engineering; Engineering & Applied Sciences; Electrical Engineering
• Lingua di pubblicazione: Inglese
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Note generali: Bibliographic Level Mode of Issuance: Monograph