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Record Nr. |
UNISA996199637803316 |
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Titolo |
IVMC '98 : 11th International Vacuum Microelectronics Conference : July 19-24, 1998, The Grove Park Inn Asheville, NC, USA / / Institute of Electrical and Electronics Engineers |
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Pubbl/distr/stampa |
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Piscataway, New Jersey : , : Institute of Electrical and Electronics Engineers, , 1998 |
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Descrizione fisica |
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1 online resource (327 pages) |
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Disciplina |
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Soggetti |
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Vacuum technology |
Microelectronics |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Bibliographic Level Mode of Issuance: Monograph |
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