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Record Nr. |
UNINA9911006684903321 |
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Titolo |
Handbook of semiconductor wafer cleaning technology : science, technology, and applications |
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Pubbl/distr/stampa |
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[Place of publication not identified], : Noyes Publications, 1993 |
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ISBN |
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0-8155-1772-6 |
1-59124-093-X |
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Collana |
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Materials science and process technology series. Handbook of semiconductor wafer cleaning technology |
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Disciplina |
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Soggetti |
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Semiconductor wafers - Cleaning |
Electrical & Computer Engineering |
Engineering & Applied Sciences |
Electrical Engineering |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Bibliographic Level Mode of Issuance: Monograph |
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