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Record Nr. |
UNINA9911006681403321 |
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Autore |
Liu Huimin <1961-> |
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Titolo |
Diamond chemical vapor deposition : nucleation and early growth stages / / by Huimin Liu and David S. Dandy |
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Pubbl/distr/stampa |
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Park Ridge, N.J., : Noyes Publications, c1995 |
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ISBN |
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1-282-75509-9 |
9786612755095 |
1-282-01382-3 |
9786612013829 |
0-8155-1687-8 |
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Descrizione fisica |
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1 online resource (207 p.) |
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Altri autori (Persone) |
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Disciplina |
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Soggetti |
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Diamonds, Artificial |
Chemical vapor deposition |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Description based upon print version of record. |
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Nota di bibliografia |
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Includes bibliographical references (p. 160-182) and index. |
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Nota di contenuto |
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Front Cover; Diamond Chemical Vapor Deposition: Nucleation and Early Growth Stages; Copyright Page; Contents; Chapter 1 General Introduction; Chapter 2 Atomic and Crystal Structures of Diamond; Chapter 3 Diamond CVD Techniques; 1.0 HOT-FILAMENT CVD; 2.0 PLASMA-ASSISTED CVD; 3.0 FLAME CVD; 4.0 GENERAL CHARACTERISTICS OF DIAMOND CVD PROCESSES; 5.0 SUMMARY; Chapter 4 Diamond Nucleation Mechanisms; 1.0 HOMOGENEOUS NUCLEATION-GAS-PHASE NUCLEATION; 2.0 HETEROGENEOUS NUCLEATION-SURFACE NUCLEATION; 3.0 SUMMARY; Chapter 5 Diamond Epitaxy, Oriented Growth, and Morphology Evolution; 1.0 EPITAXY |
2.0 ORIENTED AND TEXTURED GROWTH3.0 MORPHOLOGY EVOLUTION; 4.0 SUMMARY; Chapter 6 Effects of Surface Conditions on Diamond Nucleation; 1.0 SUBSTRATE MATERIALS; 2.0 SURFACE PRETREATMENT METHODS AND NUCLEATION ENHANCEMENT MECHANISMS; 3.0 SUMMARY; Chapter 7 Effects of Deposition Conditions on Diamond Nucleation; 1.0 SUBSTRATE TEMPERATURE; 2.0 GAS-PHASE ACTIVATION; 3.0 GAS PRESSURE AND FLOW RATE; 4.0 GAS |
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COMPOSITION; 5.0 OXYGEN ADDITION; 6.0 SUMMARY; Chapter 8 Theoretical and Modeling Studies on Diamond Nucleation; 1.0 IDENTIFICATION OF NUCLEATION AND GROWTH MODE |
2.0 THEORETICAL STUDIES ON NUCLEATION THERMODYNAMICS3.0 THEORETICAL MODELING OF NUCLEATION KINETICS; 4.0 CLUES OF STRUCTURE, CHEMISTRY, AND SIZE OF DIAMOND NUCLEI; 5.0 SUMMARY; References |
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Sommario/riassunto |
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This book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth of diamond CVD. The objective is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experiences researchers, scientists, and engineers in academia and industry with the latest developments in this growing field. |
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