Fundamental principles of engineering nanometrology / / by Richard K. Leach

• Record Nr.: UNINA9911004822103321
• Autore: Leach R. K
• Pubbl/distr/stampa: Oxford, : Wlliam Andrew; Amsterdam, : Elsevier Science, 2009
• ISBN: 1-282-38196-2; 9786612381966; 1-4377-7832-1
• Edizione: [1st ed.]
• Descrizione fisica: 1 online resource (349 p.)
• Collana: Micro and nano technologies
• Disciplina: 620.5; 620.50287
• Soggetti: Nanotechnology; Microtechnology; Metrology
• Lingua di pubblicazione: Inglese
• Formato: Materiale a stampa
• Livello bibliografico: Monografia
• Note generali: Description based upon print version of record.
• Nota di bibliografia: Includes bibliographical references and index.
• Nota di contenuto: Front Cover; Fundamental Principles ofEngineering Nanometrology; Copyright; Contents; Acknowledgements; Figures; Tables; CHAPTER 1Introduction to metrology for micro- and nanotechnology; 1.1 What is engineering nanometrology?; 1.2The contents of this book; 1.3References; CHAPTER 2 -Some basics of measurement; 2.1Introduction to measurement; 2.2Units of measurement and the SI; 2.3Length; 2.4Mass; 2.5Force; 2.6Angle; 2.7Traceability; 2.8Accuracy, precision, resolution, error and uncertainty; 2.10References; CHAPTER 3 -Precision measurement instrumentation - some design principles; 3.1Geometrical considerations3.2Kinematic design; 3.3Dynamics; 3.4The Abbe Principle; 3.5Elastic compression; 3.6Force loops; 3.7Materials; 3.8Symmetry; 3.9Vibration isolation; 3.10References; CHAPTER 4Length traceability using interferometry; 4.1Traceability in length; 4.2Gauge blocks - both a practical and traceable artefact; 4.3Introduction to interferometry; 4.4Interferometer designs; 4.5Gauge block interferometry; 4.6References; CHAPTER 5Displacement measurement; 5.1Introduction to displacement measurement; 5.2; Displacement interferometry; 5.3Capacitive displacement sensors; 5.4Inductive displacement sensors5.5Optical encoders; 5.6Optical fibre sensors; 5.7Calibration of displacement sensors; 5.8References; CHAPTER 6 Surface topography measurement instrumentation; 6.1Introduction to surface topography measurement; 6.2Spatial wavelength ranges; 6.3Historical background of classical surface texture measuring instrumentation; 6.4Surface profile measurement; 6.5Areal surface texture measurement; 6.6Surface topography measuring instrumentation; 6.7Optical instruments; 6.8Capacitive instruments; 6.9Pneumatic instruments; 6.10Calibration of surface topography measuring instruments6.11Uncertainties in surface topography measurement; 6.12Comparisons of surface topography measuring instruments; 6.13Software measurement standards; 6.14References; CHAPTER 7Scanning probe and particle beam microscopy; 7.1Scanning probe microscopy; 7.2Scanning tunnelling microscopy; 7.3Atomic force microscopy; 7.4Scanning probe microscopy of nanoparticles; 7.5Electron microscopy; 7.6Other particle beam microscopy techniques; 7.7References; CHAPTER 8Surface topography characterization; 8.1Introduction to surface topography characterization8.2Surface profile characterization; 8.3Areal surface texture characterization; 8.4Fractal methods; 8.5Comparison of profile and areal characterization; 8.6References; CHAPTER 9Coordinate metrology; 9.1Introduction to CMMs; 9.2Sources of error on CMMs; 9.3Traceability, calibration and performance verification of CMMs; 9.4Miniature CMMs; 9.5Miniature CMM probes; 9.6Calibration of miniature CMMs; 9.7References; CHAPTER 10Mass and force measurement; 10.1Traceability of traditional mass measurement; 10.2Low-mass measurement; 10.3Low-force measurement
• Sommario/riassunto: Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force