1.

Record Nr.

UNINA9910877458803321

Titolo

System-level modeling of MEMS / / edited by Tamara Bechtold, Gabriele Schrag, and Lihong Feng

Pubbl/distr/stampa

Weinheim, : Wiley-VCH, 2013

ISBN

3-527-64713-9

1-299-15734-3

3-527-64712-0

Descrizione fisica

1 online resource (564 p.)

Collana

Advanced micro & nanosystems

Altri autori (Persone)

BechtoldT (Tamara)

SchragGabriele

FengLihong

Disciplina

621.381

Soggetti

Microelectromechanical systems

Lingua di pubblicazione

Inglese

Formato

Materiale a stampa

Livello bibliografico

Monografia

Note generali

Description based upon print version of record.

Nota di bibliografia

Includes bibliographical references and index.

Nota di contenuto

pt. I. Physical and mathematical fundamentals -- pt. II. Lumped element modeling method for MEMS devices -- pt. III. Mathematical model order reduction for MEMS devices -- pt. IV. Modeling of entire microsystems -- pt. V. Software implementations.

Sommario/riassunto

Filling a gap in the literature, this is the first handbook to simultaneously address the three most important approaches of system-level modeling: physical modeling with lumped elements and Kirchhoffian networks, modal modeling to accurately describe the mechanical domain, and mathematical modeling employing, for example, model order reduction methods. By adopting this approach, the top editors and authors from industry and research have created a book that will set the standard for years to come. Writing on a clearly understandable and sufficiently detailed level, they familiarize reader