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Record Nr. |
UNINA9910872931603321 |
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Titolo |
2002 7th International Symposium on Plasma- and Process-Induced Damage : June 5-7, 2002, Maui, Hawaii, USA |
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Pubbl/distr/stampa |
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[Place of publication not identified], : AVS, 2002 |
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Disciplina |
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Soggetti |
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Semiconductor wafers - Effect of radiation on |
Semiconductors |
Plasma radiation |
Electrical & Computer Engineering |
Engineering & Applied Sciences |
Electrical Engineering |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Bibliographic Level Mode of Issuance: Monograph |
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