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Record Nr. |
UNINA9910872737603321 |
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Titolo |
IEEE micro electro mechanical systems : proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995 |
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Pubbl/distr/stampa |
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[Place of publication not identified], : Institute of Electrical and Electronics Engineers, 1995 |
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Soggetti |
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Electromechanical devices |
Microelectronics |
Detectors |
Actuators |
Electrical & Computer Engineering |
Electrical Engineering |
Engineering & Applied Sciences |
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Lingua di pubblicazione |
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Formato |
Materiale a stampa |
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Livello bibliografico |
Monografia |
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Note generali |
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Bibliographic Level Mode of Issuance: Monograph |
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