| |
|
|
|
|
|
|
|
|
1. |
Record Nr. |
UNINA9910872472003321 |
|
|
Titolo |
2003 8th International Symposium on Plasma- and Process-Induced Damage : April 24-25, 2003, Corbeil-Essonnes, France |
|
|
|
|
|
|
|
Pubbl/distr/stampa |
|
|
[Place of publication not identified], : IEEE, 2003 |
|
|
|
|
|
|
|
Disciplina |
|
|
|
|
|
|
Soggetti |
|
Semiconductor wafers - Effect of radiation on |
Semiconductors |
Plasma radiation |
Electrical & Computer Engineering |
Engineering & Applied Sciences |
Electrical Engineering |
|
|
|
|
|
|
|
|
Lingua di pubblicazione |
|
|
|
|
|
|
Formato |
Materiale a stampa |
|
|
|
|
|
Livello bibliografico |
Monografia |
|
|
|
|
|
Note generali |
|
Bibliographic Level Mode of Issuance: Monograph |
|
|
|
|
|
| |